Abstract: In semiconductor manufacturing, to improve the throughput of cluster tools, process modules (PMs) are designed to have multiple spaces such that more than one wafers can be processed in a PM ...
The US Navy’s beleaguered shipbuilding program took a major hit on Tuesday as Navy Secretary John Phelan announced he was cancelling plans to buy Constellation-class frigates, once heralded as a key ...
Abstract: This study presents a novel robotic module that combines rigid, rigid but compliant, and soft components to enable actuation, proprioceptive sensing, and variable stiffness. Three ...
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